清原 修次 博士の研究業績


１. 研究論文（レフリ−付き）
  1. I. Miyamoto, S. Kiyohara and Y. Kiyohara: Focused Ion Beam Machining of Diamond Probes, Proc. 1st Meeting on IESJ, (1992) pp.173-176.
  2. I. Miyamoto and S. Kiyohara: Oxygen Ion Beam Etching of Diamond (100), Proc. of 1993 ASPE Annual Meeting,（1993）pp.301-304.
  3. 宮本岩男，清原修二：リアクティブイオンビームによるダイヤモンドの超精密加工，砥粒加工学会誌，Vol.38，No.5 （1994）pp.262ー266.
  4. S. Kiyohara and I. Miyamoto: Etching Characteristics of diamonds with Reactive Ion Beams, Proc. BEAMS Editor J. Ishikawa, (1994) pp.89-92.
  5. S. kiyohara and I. Miyamoto: Ultara-precision processing of diamond with oxygen ion beam, JSPE Publication Series No.1, 7th ICPE & 4th ICHT (1994) pp.576-581.
  6. I. Miyamoto and S. Kiyohara: Focused Ion Beam Machining of Diamond Probe -Simulation for Profile Changes of Probe-, Proc. of 1994 ASPE Annual Meeting,（1994）pp.436-439.
  7. S. Kiyohara and I. Miyamoto: Hydrogen Ion Beam Processing of Single Crystal Diamond Chips, Mat. Res. Soc. Symp. Proc., Vol.354 (1995) pp.717-722.
  8. I. Miyamoto, S. Kiyohara, M. Ide, M. Itami and S. Honda: Focused Ion Beam Machining of Diamond Chips and Probes, Int. J. Japan Soc. Prec. Eng., Vol.29, No.4 (1995) pp.295-300.
  9. S. Kiyohara and I. Miyamoto: Reactive Ion Beam Machining of Diamond using an ECR-type Oxygen Source, Nanotechnology, Vol.7, No.3 (1996) pp.270-274.
  10. 清原修二，宮本岩男：ＥＣＲ型イオン源を用いた単結晶ダイヤモンドの酸素イオンビーム加工，精密工学会誌，Vol.62, No.10 (1996) pp.1459-1463.
  11. S. Kiyohara, I. Miyamoto, K. Kitazawa and S. Honda: Ion Beam Assisted Chemical Etching of Single Crystal Diamond Chips, Nucl. Inst. and Meth. in Phys. Rese.B, Vol.121, No.1-4 (1997) pp.510-513.
  12. S. Kiyahora, I. Miyamoto, T. Masaki and S. Honda: Ion Beam Smoothing of CVD Diamond Thin Films by Etchback Method, Nucl. Inst. and Meth. in Phys. Rese.B, Vol.121, No.1-4 (1997) pp.191-194.
  13. S. Kiyohara, I. Miyamoto, Y. Yagi and K. Mori: Radical Oxygen Beam Machining of Single Crystal Diamond Chips, Proceedings of the International Conference on Precision Engineering, Vol.2 (1997) pp.637-641.
  14. 清原修二：ダイヤモンドのイオンビーム加工に関する研究，博士学位論文 （1997）
  15. S. Kiyohara, Y. Yagi and K. Mori: Plasma Etching of CVD Diamond Films using an ECR-type Oxygen Source, Nonotechnology, Vol.10, No.4 (1999) pp.385-388.
  16. S. Kiyohara, T. Abe, K. Ayano and K. Mori: ECR-Oxygen Plasma Machining of CVD Diamond Films, Proc. of 1st International Conference and General Meeting of the European Society for Presicion Engineering and Nanotechnology, Vol.2 (1999) pp.60-63.
  17. S. Kiyohara, K. Ayano, T. Abe and K. Mori: Micropatterning of Chemical-Vapor-Deposited Diamond Films in Electron Beam Lithography, Jpn. J. Appl. Phys., Vol.39, No.7B (2000) pp.4532-4535.
  18. I. Miyamoto, J. Taniguchi and S. Kiyohara: Fine Finishing of Diamond Tools with Broad Ion Beams, New Diamond and Frontier Carbon Technology, Vol.10, No.2 (2000) pp.63-77.
  19. S. Kiyohara, I. Miyamoto, J. Taniguchi and K. Mori: Oxygen ion beam assisted etching of single crystal diamond chips using reactive oxygen gas, J. Materials Sci. : Materials in Electronics, Vol.12, No.8 (2001) pp.477-481.
  20. S. Kiyohara and K. Mori: Fabrication of Diamond Micropatterns by ECR Oxygen Plasma with a Metal Napthenate Mask, Proceedings of the 6th Applied Diamond Conference/2nd Frontier Carbon Technology Joint Confernce, (2001) pp.317-322.
  21. S. Kiyohara and K. Mori: Microfabrication of diamond Films by Localized Electron Beam Chemical Vapour Deposition, Semiconductor Science and Technology, Vol.17, No.10 (2002) pp.1096-1100.
  22. S. Kiyohara, T. Motoishi and K. Mori: Nanopatterning of diamond films with composite oxide mask metal octylates in Electron Beam Lithography, J. Materials Sci. : Materials in Electronics, Vol.15, No.2 (2004) pp.99-102.
  23. S. Kiyohara, T. Motoishi and K. Mori: Nanopatterning of Chemical Vapor Deposited Diamond Films in Room Temperature Nanoimprint Lithography Using Diamond Molds, Mat. Res. Soc. Symp. Proc., Vol.EXS-2 (2004) pp.73 -75 .
  24. S. Kiyohara, M. Fujiwara, F. Matsubayashi and K. Mori: Organic Light-Emitting Microdevices Fabricated by Nanoimprinting Technology　Using Daimond Molds, Jpn. J. Appl. Phys., Vol.44, No.6A (2005) pp.3686-3690.
  25. S. Kiyohara, M. Fujiwara, F. Matsubayashi and K. Mori: Diamond nanopatterns fabricated by room-temperature nanoimprinting technology with diamond molds using polysiloxane, J. Materials Sci. : Materials in Electronics, Vol.17, No.3 (2006) pp.199-203.
  26. S. Kiyohara, T. Kashiwagi, H. Takikawa, Y. Kurashima, Y. Taguchi and Y. Sugiyama: Nanofabrication of Three-Dimensional Imprint Diamond Molds by ECR Oxygen Ion Beams using Polysiloxane, e-Journal of Surface Science and Nanotechnology, Vol.7 (2009) pp.772-776.
  27. 清原修二，柏木大幸，滝川浩史，倉島優一，田口佳男，杉山嘉也，小俣有紀子：ダイヤモンドモールド室温ナノインプリントリソグラフィによるダイヤモンド薄膜のナノ加工，舞鶴工業高等専門学校紀要，第45号，(2010) pp.25-35.
  28. S. Kiyohara, S. Araki, Y. Kurashima, Y. Taguchi, Y. Sugiyama, Y. Omata: Nanoimprint glass-like carbon molds fabricated with ECR oxygen ion beams using polysiloxane oxide mask, J. Mater. Sci. : Mater. Electron., Vol.22, No.2 (2011) pp.183-188.
  29. S. Kiyohara, M. Kumagai, Y. Taguchi, Y. Sugiyama, Y. Omata, Y. Kurashima and H. Takikawa: Diamond Nanopit Arrays Fabricated by Room-Temperature Nanoimprinting using Diamond Molds, Mater. Res. Soc. Symp. Proc., Vol.1282 (2011) pp.117-122.
  30. S. Kiyohara, C. Ito, I. Ishikawa, H. Takikawa, Y. Taguchi, Y. Sugiyama, Y. Omata and Y. Kurashima: Fabrication of Diamond Nanopit arrays by Room-temperature Curing Nanoimprint Lithography Using Glass-like Carbon Molds, Mater. Res. Soc. Symp. Proc., Vol.1395 (2012) pp. 27-32.
  31. I. Ishikawa, T. Okuno, S. Kiyohara, Y. Taguchi, Y. Sugiyama, Y. Omata and Y. Kurashima: Micro-Organic Light-Emitting Devices Fabricated by Room-Temperature Curing Nanoimprint Lithography Using Diamond Molds, Mater. Res. Soc. Symp. Proc., Vol.1395 (2012) pp. 33-38.
  32. S. Kiyohara, T. Ikegaki，I. Ishikawa，H. Tanoue, H. Takikawa，Y. Taguchi，Y. Sugiyama，Y. Omata，Y. Kurashima: Fabrication of DLC-based Micro-gear patterns by Room-temperature Curing Nanoimprint Lithography Using Glass-like Carbon Molds, Mater. Res. Soc. Symp. Proc., Vol.1511 (2013) mrsf12-1511-ee05-01, doi: 10.1557/opl.2013.21
  33. S. Kiyohara, S. Matta, I. Ishikawa, H. Tanoue, H. Takikawa, Y. Taguchi, Y. Sugiyama, Y. Omata, Y. Kurashima: Nanofabrication of DLC-dot Arrays by Room-temperature Curing Imprint-liftoff Method, Mater. Res. Soc. Symp. Proc., Vol.1511 (2013) mrsf12-1511-ee05-02, doi: 10.1557/opl.2013.15
  34. I. Ishikawa, K. Sakurai, S. Kiyohara, C. Ito, H. Tanoue, Y. Suda, H. Takikawa, Y. Taguchi, Y. Sugiyama, Y. Omata, Y. Kurashima: Fabrication of Micro-OLEDs by Room-temperature Curing Contact-imprint Using DLC Molds, Mater. Res. Soc. Symp. Proc., Vol.1511 (2013) mrsf12-1511-ee05-03, doi: 10.1557/opl.2012.1711
  35. 石川一平，中津徳人，清原修二：放射線教育のためのプラスチック板を用いた可視化計測技術の検討，日本高専学会誌，第18巻，第3号　(2013) pp.53-56.
  36. Kensuke Tsuji, Ippei Ishikawa and Shuji Kiyohara: Approach to educational method for radiation measurements using plastics, Proc. the 7th International Symposium on Advances in Technology Education (2013) pp.397-400.
  37. Shuji Kiyohara, Ippei. Ishikawa, Yuto Shimizu, Shogo Yoshida, Toru Harigai, Hirofumi Takikawa, Masahiko Watanabe, Yoshinari Sugiyama, Yukiko Omata and Yuichi Kurashima: FABRICATION OF DIAMOND-LIKE CARBON-BASED MICRO/NANO DEVICE USING ROOM-TEMPERATURE NANOIMPRINT BY INDUSTRY-UNIVERSITY COLLABORATIVE RESEARCH, Proc. the 9th International Symposium on Advances in Technology Education, (2015) pp.548-551.
  38. Shuji Kiyohara, Shogo Yoshida, Ippei Ishikawa, Toru Harigai, Hirofumi Takikawa,Masahiko Watanabe, Yoshinari Sugiyama, Yukiko Omata and Yuichi Kurashima: Fabrication of Diamond-Like Carbon Emitter Patterns by Room- Temperature Curing Nanoimprint Lithography with PDMS Molds UsingPolysiloxane, MRS Advances, Vol.1, Issue 16 (2016) pp.1075-1080, doi:10.1557/adv.2016.49
  39. Shuji Kiyohara, Yuto Shimizu, Ippei Ishikawa, Toru Harigai, Hirofumi Takikawa,Masahiko Watanabe, Yoshinari Sugiyama, Yukiko Omata and Yuichi Kurashima: Fabrication of Diamond-Like Carbon Microgears in Room-Temperature Curing Nanoimprint Lithography Using Ladder-Type Hydrogen Silsesquioxane, MRS Advances, Vol.1, Issue 16 (2016) pp.1119-1124, doi:10.1557/adv.2016.126
  40. 石川一平, 清原修二：放射線飛跡を可視化するプラスチック教材を用いた教育方法の実践，応用物理教育，Vol.40, No.2　(2016.12)　pp.101-106.
  41. Yushi Iijima, Toru Harigai, Ryo Isono, Takahiro Imai, Yoshiyuki Suda, Hirofumi Takikawa, Masao Kamiya, Makoto Taki, Yushi Hasegawa, Nobuhiro Tsuji, Satoru Kaneko, Shinsuke Kunitsugu, Hitoe Habuch, Shuji Kiyohara, Mikio Ito, Sam Yick, Avi Bendavid, and Phil Martin: Fabrication of Nitrogen-Containing DLC Film by Filtered Arc Deposition as Conductive Hard-Coating Film, Jpn. J. Appl. Phys., Vol.57, No.1S (2018) p.01AE07.
  42. 清原修二，石川一平，針谷達，滝川浩史，倉島優一：室温ナノインプリントリソグラフィを用いた小・中学生のためのナノテクノロジー教育，応用物理教育，Vol.45, No.1　(2021.6)　pp.1-6.
  43. Ippei Ishikawa, Atsushi Kimoto, Shuji Kiyohara: Development of UV-Irradiated PADC and Improvement of Etching for Reducing Experimental Time, Materials, 16(15), (2023) 5413
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1. 研究論文（レフリー付）

2. 研究論文（レフリーなし）

3. 解説論文

4. 国際会議

5. 学会発表

6. 著書
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